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Dynamic Microsystems Lab

Dynamic µSystems Lab

http://microsystems.okstate.edu/

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Dynamic Microsystems Lab | microsystems.okstate.edu Reviews
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Dynamic Microsystems Lab | microsystems.okstate.edu Reviews

https://microsystems.okstate.edu

Dynamic µSystems Lab

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1

Courses

http://microsystems.okstate.edu/index.php/courses

Papers accepted to MEMS 2014. Papers accepted to MEMS 2013. Introduction to MEMS (ECEN 5923). Uarr;↑↑. Monday, 29. August 2016 Designed by: LernVid.com.

2

Scholarship awardees

http://microsystems.okstate.edu/index.php/component/content/article/24-news/62-spie2012

Papers accepted to MEMS 2014. Papers accepted to MEMS 2013. Hediyeh and Mohammad have both been awarded the T. Miller scholarship for the 2013-14 academic year. Uarr;↑↑. Monday, 29. August 2016 Designed by: LernVid.com.

3

Papers accepted to MEMS 2014

http://microsystems.okstate.edu/index.php/component/content/article/24-news/65-mems13

Papers accepted to MEMS 2014. Papers accepted to MEMS 2013. Papers accepted to MEMS 2014. Papers accepted to MEMS 2014. Ultra-Stable Nonlinear Thin-Film Piezoelectric-on-Substrate Oscillators Operating at Bifurcation. And Jonathan's paper entitled:. Resonant Micro-Sensor Platform for Contact-Free Charactrization of Liquid Properties. Have been accepted for presentation at the 2014 international MEMS conference in San Francisco, USA. Uarr;↑↑. Monday, 29. August 2016 Designed by: LernVid.com.

4

Group Members

http://microsystems.okstate.edu/index.php/members

Papers accepted to MEMS 2014. Papers accepted to MEMS 2013. Uarr;↑↑. Monday, 29. August 2016 Designed by: LernVid.com.

5

Facilities

http://microsystems.okstate.edu/index.php/facilities

Papers accepted to MEMS 2014. Papers accepted to MEMS 2013. Our cleanroom is located on the first floor of the Helmerich Advanced Research Center at OSU-Tulsa. It features a class-1000 characterization main hallway and three adjacent class-100 bays. The first bay is the lithography bay, the second one is vapor deposition systems, and the third one houses plasma processing tools. Http:/ www.osu-tulsa.okstate.edu/helmerich/index.php. A very powerful DC power supply with two independent outputs variable fro...

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OEM Group Foundry Services

http://www.oemgroupinc.com/foundry.php

AlCrN Piezo - 10.11. AlN Films - 09.11. Valeriy V. Felmetsger. Mikhail K. Mikhov. Surplus Inventory for Sale. OEM Group Foundry Services. OEM Group Foundry Services technologists use the SFI Endeavor AT PVD System. AlN reactive sputtering on 100mm quartz wafer. Cross-section of process module for AC reactive sputtering. SEM of an AlN-on-silicon resonator fabricated by the Microsystems group at Oklahoma State University. X-ray diffraction patterns of ultrathin. AlN films deposited on Mo using a two-step.

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